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Semiconductor Capital Equipment Services

About

TECO offers OEMs superior fluid automation/pneumatic Semiconductor solutions that deliver precise repeatability, small footprint, low power consumption, and exceptional life expectancy.

We Deliver

80+ years combined experience supporting accurate product selection and sizing for Semiconductor application requirements. TECO Technology partners with numerous manufacturers to procure the best products for you. Lean on us when it comes to selection, knowledge, and experience.

Call on us when you require quality design, assembly and production.

VALVES

 

Micro Valve 5.9mm widthFluropolymer Valve Chemical CompatibilityProportional Valve  Repeatable to 2% F.SValve Manifold 100M+ Cycles Flow Control Repeatable Settings Cryogenic Valve Low Media Temp
  • Micro Valve - 5.9mm Width
  • Fluropolymer Valve - Chemical Compatibility
  • Proportional Valve - Repeatable to 2% F.S
  • Valve Manifold - 100M+ Cycles
  • Flow Control - Repeatable Settings
  • Cryogenic Valve - Low Media Temp

ACTUATORS

Bernoulli Cylinders Non ContactMini Guide Cylinders - 0.0002" ParallelismGuided Actuators - 10 Million CyclesCleanroom Cylinder - ISO Class 5 Compact Cylinders - High Temp 150CAir Bearing - Low Friction

  • Bernoulli Cylinders - Non Contact
  • Mini Guide Cylinders - 0.0002" Parallelism
  • Guided Actuators - 10 Million Cycles
  • Cleanroom Cylinder - ISO Class 5
  • Compact Cylinders - High Temp 150C
  • Air Bearing - Low Friction

OTHER

Integrated Actuator - Simple ProgrammingUPS - Hybrid TechnologyLiquid Pump - High PrecisionSensors - Chemical ResistantCameras - Up to 24 MP/891 fpsMotors - 5.9mm Width
  • Integrated Actuator - Simple Programming
  • UPS - Hybrid Technology
  • Liquid Pump - High Precision
  • Sensors - Chemical Resistant
  • Cameras - Up to 24 MP/891 fps
  • Motors - 5.9mm Width.

Products - Advanced Technology

01: ENGINEERED SOLUTIONS

TECO Engineered Solutions

Our Engineered Solutions Group offers complete fluid handling and pneumatic system design, development and production capabilities

02: COMPONENTS

TECO Technology Semiconductor Components

We are a full line supplier of fluid and motion control products and systems. We offer the products you need and the expertise to apply them properly in your application

03: INTEGRATION

TECO Technology Integrated Solutions

TECO works with our customers through all stages of the manufacturing process, including concept, prototype, production and readiness delivery.

04: BRANDS

Baumer logo on homepageKoganei logo on homepageAventics logo on homepageGAST Logo on homepagesanyo denkiIDEC logo on homepage

 Rollon logo on homepageIntelligent Actuator logo on homepage

TECO represents leaders in the semiconductor industry.

 

APPLICATIONS

Semiconductor

  • Photoresist
  • Coating Equipment
  • Chemical Mechanical Planarization
  • Chemical Vapor Deposition
  • Wafer Inspection
  • Metrology
  • Wet Bench
  • IC Test
  • Etch
  • HDD

Call on us when you require quality design, assembly and production.

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